DST SERIES – Track Line solutions for lithography process
Manz DST Series combines a series of steps of the photo lithography process in the display production. It includes pre-treatment and post-treatment of the panels, photoresist coating and development. DST Series can be easily integrated in your existing production environment and disposes of real-time monitoring. Thus, it effectively reduces production variability as well as costs and improves the process yield.
FEATURES
The DST Series - Track Line Solutions includes cleaning, slit coating and developing process tools integrated with self-developed computer integration manufacturing system (CIM) and outstanding automatic handling systems.
- Touch/Cover Glass (DST 100 Series, including roll-to-roll solutions)
- A-Si TFT (DST 200 Series, including roll-to-roll solutions)
- LTPS (DST 300 Series, including roll-to-roll solutions)
- Fan-out (DST 500 Series)
ADVANTAGES
- No scratches, water or roller marks on the substrates after the processes
- Slit Coater effectively reduces consumption of photoresist and thus improves production costs and yield
- Real-time monitoring enables engineers to prevent defects in advance or to identify the cause
quickly - Outstanding integration ability of hardware and software effectively improves process yield and reduces production variability and cost
- One-stop solution: From the equipment purchase up to software and hardware integration
TECHNICAL DATA
| Market segmentation | Touch Panel / Cover Glasses / a-Si TFT / Fan Out |
|
Production uptime |
≥ 98 % |
|
Substrate thickness |
0.3 mm (0.2 mm demo testing) |
|
Transportation pass |
± 0.5 mm |
|
Coating uniformity |
≤ 2.5 % |
|
Breakage rate |
< 1/10,000 |
|
CD uniformity |
3 σ ≦ 0.3 µm |
|
Control |
Mitsubishi PLC with color touchscreen |