DWO SERIES - DISPLAY WET-CHEMICAL SLIT COATER
Precision coating for TFT array, color filter, touch sensor & Perovskite
FEATURES
Precision coating for TFT array, color filter, touch sensor & Perovskite
- Unique BCS （Block Control Systems）design
- Manz Computer-Integrated Manufacturing (CIM) System equiped
- Optimum process integration and total solution offering
ADVANTAGES
- Customized slot die design can meet customer’s material.
- Patented syringe pump provide stable and precious coating control.
- Patented switching valve with no differential pressure can provide good uniformity and patch pattern coating ability.
- Conveyor type loading and unloading system is optional for saving cost and footprint.
- Dual gantries design is optional, coating two different materials in one tool.
- Equipped particle sensor can avoid nozzle damage.
- Manz provides up and down stream tools integration, increasing productivity and reducing the loss.
TECHNICAL DATA
|
Substrate size |
G2.5~G8.5 |
|
Substrate thickness |
0.2mm~3.2mm |
|
Coating speed |
10mm/sec~200mm/sec |
|
Viscosity |
1.5cps~1,000cps@25 c |
|
Coating thickness (wet) |
5μm~200μm@25 c |
|
Coating uniformity |
<3% |