DWO SERIES - DISPLAY WET-CHEMICAL SLIT COATER

Precision coating for TFT array, color filter, touch sensor & Perovskite

FEATURES

Precision coating for TFT array, color filter, touch sensor & Perovskite

  • Unique BCS (Block Control Systems)design
  • Manz Computer-Integrated Manufacturing (CIM) System equiped
  • Optimum process integration and total solution offering

ADVANTAGES

  • Customized slot die design can meet customer’s material.
  • Patented syringe pump provide stable and precious coating control.
  • Patented switching valve with no differential pressure can provide good uniformity and patch pattern coating ability.
  • Conveyor type loading and unloading system is optional for saving cost and footprint.
  • Dual gantries design is optional, coating two different materials in one tool.
  • Equipped particle sensor can avoid nozzle damage.
  • Manz provides up and down stream tools integration, increasing productivity and reducing the loss.

TECHNICAL DATA

Substrate size

G2.5~G8.5

Substrate thickness

0.2mm~3.2mm

Coating speed

10mm/sec~200mm/sec

Viscosity

1.5cps~1,000cps@25 c

Coating thickness (wet)

5μm~200μm@25  c

Coating uniformity

<3%

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