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DAH SERIES – Display Automated Handling
With extremely low breakage rates, automated handling systems of DAH Series reduce production stops caused by airborne particles to a minimum and thus ensure a very high yield rate in the production of TFT-LCD displays and touch panels.
DLC 820 – Display Laser Cutting
The DLC 820 is a universal, multi-axis laser cutting machine that modifies unstrengthened or chemically strengthened transparent glass substrates by ultrashort pulse lasers with high cutting speed, accuracy and high-quality cutting edges (~ 90 ° edge, no heat-affected zone, highest breaking strength, < 30 μm chippings, edge roughness ~ 0.4 μm). Laser marking or scribing are also possible.
DST SERIES – Track Line solutions for lithography process
Manz DST Series combines a series of steps of the photo lithography process in the display production. It includes pre-treatment and post-treatment of the panels, photoresist coating and development. DST Series can be easily integrated in your existing production environment and disposes of real-time monitoring. Thus, it effectively reduces production variability as well as costs and improves the process yield.
DWD SERIES– Display Wet-Chemical Developing
Manz developers of DWD Series for positive and negative photoresists offer best developing uniformity and stability. For a highly precise pattern definition on panels, parts of photoresist are removed from the exposed glass substrates by developing chemicals.
DWE SERIES – Display Wet-Chemical Etching
Etching machines of Manz DWE Series achieve a very good etching uniformity and stability on substrates. Applied by spray nozzles, acids remove parts of metal or ITO films from glass substrates.
DWL SERIES – Display Wet-Chemical Cleaning
In the production processes of displays and touch panels, Manz cleaning solutions of the DWL Series remove dirt and particles on glass substrates as well as foils effectively and fast. A removal rate of more than 98 % ensures a very high quality of end-products.
DWS SERIES – Display Wet-Chemical Stripping
Manz stripping solutions of DWS Series realize a 100 % removal rate in the production of panels. Applied by spray nozzles, alkaline chemicals or solvents remove the photoresist from the glass substrates. Afterwards, an aqua knife, two fluid jets, and a DI water rinse wash the remaining chemicals and particles away.